Title :
DC and Microwave Plasmas for Synthesis of Vertically Oriented Graphene
Author :
Zheng Bo ; Yilei Tian ; Kehan Yu ; Huachao Yang ; Dan Hu ; Junhong Chen ; Jianhua Yan ; Kefa Cen
Author_Institution :
State Key Lab. of Clean Energy Utilization, Zhejiang Univ., Hangzhou, China
Abstract :
Plasma-enhanced chemical vapor deposition of vertically oriented graphene (VG) employing direct current glow discharge and microwave plasmas are presented and compared. The VG nanosheets with various morphologies can be obtained for diverse applications.
Keywords :
graphene; microwave materials processing; nanofabrication; nanostructured materials; plasma CVD; sheet materials; C; DC plasmas; VG nanosheets; direct current glow discharge; microwave plasmas; morphologies; plasma-enhanced chemical vapor deposition; vertically oriented graphene; Chemical vapor deposition; Discharges (electric); Glow discharges; Graphene; Microwave imaging; Plasmas; Substrates; Plasma applications; plasma material processing; plasma sources; plasma sources.;
Journal_Title :
Plasma Science, IEEE Transactions on
DOI :
10.1109/TPS.2014.2324176
