DocumentCode
3449685
Title
On the roles of multilayered metal catalysts in the synthesis of high-quality single-walled carbon nanotubes
Author
Su, H.C. ; Shin, K.Y. ; Leou, K.C. ; Tsai, C.H.
Author_Institution
Department of Engineering and System Science, Nation Tsing Hua University, 101 Sec. 2 Kuang Fu Road, Hsinchu, 300, Taiwan, ROC, e-mail: d947521@oz.nthu.edu.tw
fYear
2006
fDate
10-13 Jan. 2006
Firstpage
108
Lastpage
112
Abstract
In this paper, high quality single-walled carbon nanotubes (SWNTs) were synthesized by multilayered metal catalysts on silicon or silicon oxide substrate using thermal chemical vapor deposition method. The roles of multilayered metal catalyst were investigated by systematically varying the combinations of multilayered structure. Scanning electron microscopy, Atomic force microscopy, Auger electron spectroscopy, and X-ray photoelectron spectroscopy were used to examine the evolution of the morphology and the oxidation state of each constituent of the multilayered structure in the thermal processes and their roles in controlling the formation of SWNTs.
Keywords
AES; SWNTs; XPS; multilayered metal catalysts; Atomic force microscopy; Atomic layer deposition; Carbon nanotubes; Chemical vapor deposition; Morphology; Photoelectron microscopy; Scanning electron microscopy; Silicon; Spectroscopy; Thermal force; AES; SWNTs; XPS; multilayered metal catalysts;
fLanguage
English
Publisher
ieee
Conference_Titel
Emerging Technologies - Nanoelectronics, 2006 IEEE Conference on
Print_ISBN
0-7803-9357-0
Type
conf
DOI
10.1109/NANOEL.2006.1609699
Filename
1609699
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