• DocumentCode
    3449685
  • Title

    On the roles of multilayered metal catalysts in the synthesis of high-quality single-walled carbon nanotubes

  • Author

    Su, H.C. ; Shin, K.Y. ; Leou, K.C. ; Tsai, C.H.

  • Author_Institution
    Department of Engineering and System Science, Nation Tsing Hua University, 101 Sec. 2 Kuang Fu Road, Hsinchu, 300, Taiwan, ROC, e-mail: d947521@oz.nthu.edu.tw
  • fYear
    2006
  • fDate
    10-13 Jan. 2006
  • Firstpage
    108
  • Lastpage
    112
  • Abstract
    In this paper, high quality single-walled carbon nanotubes (SWNTs) were synthesized by multilayered metal catalysts on silicon or silicon oxide substrate using thermal chemical vapor deposition method. The roles of multilayered metal catalyst were investigated by systematically varying the combinations of multilayered structure. Scanning electron microscopy, Atomic force microscopy, Auger electron spectroscopy, and X-ray photoelectron spectroscopy were used to examine the evolution of the morphology and the oxidation state of each constituent of the multilayered structure in the thermal processes and their roles in controlling the formation of SWNTs.
  • Keywords
    AES; SWNTs; XPS; multilayered metal catalysts; Atomic force microscopy; Atomic layer deposition; Carbon nanotubes; Chemical vapor deposition; Morphology; Photoelectron microscopy; Scanning electron microscopy; Silicon; Spectroscopy; Thermal force; AES; SWNTs; XPS; multilayered metal catalysts;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Emerging Technologies - Nanoelectronics, 2006 IEEE Conference on
  • Print_ISBN
    0-7803-9357-0
  • Type

    conf

  • DOI
    10.1109/NANOEL.2006.1609699
  • Filename
    1609699