Title :
AlGaAs native oxides in the fabrication of high performance laser diodes
Author :
Syrbu, A. ; Mereutza, A. ; Suruceanu, G. ; Yakovlev, V. ; Caliman, A. ; Vieru, S.
Author_Institution :
Tech. Univ. of Moldova, Chisinau, Moldova
Abstract :
Some results on AlGaAs native oxides growth and their application in the fabrication of high performance laser diodes are presented. These native oxides have been used extensively in the formation of laser diodes with the active layer width of the order of 1 μm as well as for decreasing the laser diode mirrors´ reflectivity in the interval from 0.33 to 0.02
Keywords :
III-V semiconductors; aluminium compounds; gallium arsenide; laser mirrors; optical fabrication; oxidation; reflectivity; semiconductor lasers; semiconductor technology; AlGaAs; AlGaAs native oxides; fabrication; laser diodes; mirror reflectivity; Adhesives; Dielectric thin films; Diode lasers; Etching; Mirrors; Nonhomogeneous media; Optical device fabrication; Oxidation; Reflectivity; Semiconductor lasers;
Conference_Titel :
Semiconductor Conference, 1995. CAS'95 Proceedings., 1995 International
Conference_Location :
Sinaia
Print_ISBN :
0-7803-2647-4
DOI :
10.1109/SMICND.1995.494918
