Mode shape measurement of rectangular quartz plates using a microphone

Author

Watanabe, Yasuaki ; Niikura, Kentaro ; Yuan, Geng ; Goka, Shigeyoshi ; Fujita, Naoto ; Sekimoto, Hitoshi

Author_Institution

Graduate Sch. of Eng., Tokyo Metropolitan Univ., Japan

fYear

1998

fDate

27-29 May 1998

Firstpage

848

Lastpage

851

Abstract

A method for measuring the mode shapes of quartz crystal resonators using an acoustic electrostatic microphone is described. In this method the resonator driving current is strongly modulated, and a needle which is connected to the microphone picks up the modulation signal on the resonator surface. The vibrational patterns are obtained by mapping the detected modulation signals on the resonator surfaces. The experiments were carried out using AT-cut rectangular quartz plates and the results were compared with the calculations

Keywords

acoustic applications; crystal resonators; electron device testing; microphones; vibration measurement; AT-cut rectangular quartz plates; SiO₂; acoustic electrostatic microphone; detected modulation signals; mapping; microphone; mode shape measurement; modulation signal; needle; quartz crystal resonator; rectangular quartz plates; resonator driving current; resonator surface; resonator surfaces; vibrational patterns; Acoustic signal detection; Electrostatic measurements; Microphones; Needles; Optical resonators; Optical surface waves; Probes; Shape measurement; Signal detection; Vibration measurement;

fLanguage

English

Publisher

ieee

Conference_Titel

Frequency Control Symposium, 1998. Proceedings of the 1998 IEEE International

Conference_Location

Pasadena, CA

ISSN

1075-6787

Print_ISBN

0-7803-4373-5

Type

conf

DOI

10.1109/FREQ.1998.717999

Filename

717999