Title :
A low-noise MEMS acoustic vector sensor
Author :
JinPing Li ; Lijie Chen ; Zhanjiang Gong ; Shi Xin ; Meng Hong
Author_Institution :
49th Res. Inst., Res. Inst. ofChina Electron. Technol. Group Corp., Harbin, China
Abstract :
A low-noise micro-machined acoustic vector sensor is presented. It is desirable that the application of difference capacitance principle combined with bulk micro-machining silicon process techniques may improve the low frequency sensitivity and dynamic range of the acoustic vector sensor as well as its miniaturization. The microstructure of the hydrophone was fabricated by MEMS technology, and measured by underwater standing wave field. The experiment results show that the acoustic vector sensor has good low-frequency characteristic, the free-field pressure sensitivity is -179.9 dB (dB re 1V/μPa) at 1000 Hz with a about 2 dB one-third octave positive slope over the 20~2000Hz frequency response range, and the dynamic range reaches to 120 dB (100Hz BW).
Keywords :
acoustic measurement; acoustic transducers; bulk acoustic wave devices; capacitance; hydrophones; micromachining; microsensors; underwater equipment; underwater sound; MEMS acoustic vector sensor; bulk micromachining silicon process technique; difference capacitance principle; free field pressure sensitivity; frequency 1000 Hz; hydrophone microstructure fabrication; low-frequency characteristic; micromachining; underwater standing wave field; Acoustic measurements; Acoustics; Capacitance; Micromechanical devices; Noise; Sonar equipment; Vectors; MEMS; acoustic vector sensor; dynamic range; low-frequency;
Conference_Titel :
Optoelectronics and Microelectronics (ICOM), 2013 International Conference on
Conference_Location :
Harbin
Print_ISBN :
978-1-4799-1214-8
DOI :
10.1109/ICoOM.2013.6626506
