DocumentCode
3450915
Title
Growth and Characterization of Carbon Nanotubes on Porous Silicon
Author
Zhao, Zhiwei ; Pan, Likun ; Tay, Beng Kang ; Sun, Changqing
Author_Institution
School of Electrical and Electronic Engineering, Nanyang Technological University, Singapore, 639798
fYear
2006
fDate
10-13 Jan. 2006
Firstpage
379
Lastpage
382
Abstract
Carbon nanotubes (CNTs) have been synthesized on porous silicon (PS) substrates by catalytic pyrolysis of acetylene at 823, 873 and 973 K, respectively. Scanning electron microscopy, Raman spectroscopy, X-ray photoelectron spectroscopy, and Field emission measurements have been used to characterize the structures, compositions and electron emission properties of the CNTs, respectively. The results reveal that the diameters of CNTs increase with the growth temperatures as well as the intensities of D and G peaks in Raman spectra. Besides, the carbon content increases as increasing the temperature, whereas the concentrations of oxygen and silicon decrease. Field emission properties for CNTs grown at various temperatures follow exponential increase with the increase of electric field.
Keywords
Anodes; Carbon nanotubes; Chemical vapor deposition; Conductivity; Electron emission; Raman scattering; Scanning electron microscopy; Silicon; Spectroscopy; Temperature;
fLanguage
English
Publisher
ieee
Conference_Titel
Emerging Technologies - Nanoelectronics, 2006 IEEE Conference on
Print_ISBN
0-7803-9357-0
Type
conf
DOI
10.1109/NANOEL.2006.1609753
Filename
1609753
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