Title :
A Nano-MOS Array: Metallic Carbon Nanostructure Connected with Nanoscale SiO2Islands inside Insulated Alumina Nanochannels on Silicon Substrate
Author :
Mei, Y.F. ; Siu, G.G. ; Fu, Ricky K Y ; Chu, Paul K. ; Zhai, J.P. ; Wang, Y.J. ; Tsui, O.K.C. ; Tang, Z.K. ; Shi, J.J. ; Kong, M.G.
Author_Institution :
Department of Physics and Materials Science, City University of Hong Kong, Kowloon, Hong Kong, China
Abstract :
A nano-MOS array consisting of metallic carbon nanostructures connected with nanoscale SiO2islands inside insulated alumina nanochannel on silicon substrate was fabricated via Si-based porous anodic alumina (PAA) template. The electrical properties of the nano-MOS array were studied by means of current-voltage (I-V) and frequency dependent capacitance-voltage (C-V) tests. This structure is important to the application of carbon nanostructures and PAA template and has high potential in future nanoelectronics applications.
Keywords :
Application software; Dielectrics and electrical insulation; Electron beams; Materials science and technology; Physics; Plasma temperature; Quantum computing; Self-assembly; Silicon; Substrates;
Conference_Titel :
Emerging Technologies - Nanoelectronics, 2006 IEEE Conference on
Print_ISBN :
0-7803-9357-0
DOI :
10.1109/NANOEL.2006.1609760
