• DocumentCode
    3451050
  • Title

    A Nano-MOS Array: Metallic Carbon Nanostructure Connected with Nanoscale SiO2Islands inside Insulated Alumina Nanochannels on Silicon Substrate

  • Author

    Mei, Y.F. ; Siu, G.G. ; Fu, Ricky K Y ; Chu, Paul K. ; Zhai, J.P. ; Wang, Y.J. ; Tsui, O.K.C. ; Tang, Z.K. ; Shi, J.J. ; Kong, M.G.

  • Author_Institution
    Department of Physics and Materials Science, City University of Hong Kong, Kowloon, Hong Kong, China
  • fYear
    2006
  • fDate
    10-13 Jan. 2006
  • Firstpage
    408
  • Lastpage
    412
  • Abstract
    A nano-MOS array consisting of metallic carbon nanostructures connected with nanoscale SiO2islands inside insulated alumina nanochannel on silicon substrate was fabricated via Si-based porous anodic alumina (PAA) template. The electrical properties of the nano-MOS array were studied by means of current-voltage (I-V) and frequency dependent capacitance-voltage (C-V) tests. This structure is important to the application of carbon nanostructures and PAA template and has high potential in future nanoelectronics applications.
  • Keywords
    Application software; Dielectrics and electrical insulation; Electron beams; Materials science and technology; Physics; Plasma temperature; Quantum computing; Self-assembly; Silicon; Substrates;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Emerging Technologies - Nanoelectronics, 2006 IEEE Conference on
  • Print_ISBN
    0-7803-9357-0
  • Type

    conf

  • DOI
    10.1109/NANOEL.2006.1609760
  • Filename
    1609760
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3451050