DocumentCode
3451089
Title
Cubic SiC Nano-thin Films and Nano-wires: High Vacuum MOCVD, Surface Characterization, and Application Tests
Author
Hyun, J.-S. ; Kang, B.-C. ; Park, J.-H. ; Nam, S.-H. ; Boo, J.-H. ; Park, Je-Ho ; Nam, S.-H. ; Boo, J.-H.
Author_Institution
Department of Chemistry and Institute of Basic Science, Sungkyunkwan University, Suwon 440-746, Korea
fYear
2006
fDate
10-13 Jan. 2006
Firstpage
418
Lastpage
422
Abstract
Singlecrystalline, epitaxial cubic silicon carbide (β-SiC) nano-thin films have been deposited on Si
Keywords
Chemical vapor deposition; III-V semiconductor materials; MOCVD; Microelectronics; Micromechanical devices; Nanoscale devices; Silicon carbide; Substrates; Temperature dependence; Testing;
fLanguage
English
Publisher
ieee
Conference_Titel
Emerging Technologies - Nanoelectronics, 2006 IEEE Conference on
Print_ISBN
0-7803-9357-0
Type
conf
DOI
10.1109/NANOEL.2006.1609762
Filename
1609762
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