Title :
Cubic SiC Nano-thin Films and Nano-wires: High Vacuum MOCVD, Surface Characterization, and Application Tests
Author :
Hyun, J.-S. ; Kang, B.-C. ; Park, J.-H. ; Nam, S.-H. ; Boo, J.-H. ; Park, Je-Ho ; Nam, S.-H. ; Boo, J.-H.
Author_Institution :
Department of Chemistry and Institute of Basic Science, Sungkyunkwan University, Suwon 440-746, Korea
Abstract :
Singlecrystalline, epitaxial cubic silicon carbide (β-SiC) nano-thin films have been deposited on Si
Keywords :
Chemical vapor deposition; III-V semiconductor materials; MOCVD; Microelectronics; Micromechanical devices; Nanoscale devices; Silicon carbide; Substrates; Temperature dependence; Testing;
Conference_Titel :
Emerging Technologies - Nanoelectronics, 2006 IEEE Conference on
Print_ISBN :
0-7803-9357-0
DOI :
10.1109/NANOEL.2006.1609762
