Title :
Theoretical analysis of a piezoelectric thin film resonator with acoustic quarter-wave multilayers
Author :
Nakamura, Kiyoshi ; Kanbara, Hirofumi
Author_Institution :
Graduate Sch. of Eng., Tohoku Univ., Sendai, Japan
Abstract :
The purpose of this paper is to theoretically analyse the piezoelectric thin film resonator with acoustic multilayers by considering acoustic loss, electrode thickness, and thickness deviation of respective layers including the piezoelectric film. The dependence of the resonance and antiresonance frequencies, the Q-factor, and the effective electromechanical coupling factor on resonator parameters, especially on the total number of multilayers, is discussed in contrast to the case of a piezoelectric film with traction-free surfaces
Keywords :
Q-factor; acoustic impedance; acoustic resonance; crystal resonators; multilayers; piezoelectric thin films; acoustic loss; acoustic multilayers; acoustic quarter-wave multilayers; electrode thickness; piezoelectric thin film resonator; thickness deviation; Acoustic devices; Acoustic waves; Electrodes; Equivalent circuits; Frequency; Nonhomogeneous media; Piezoelectric films; Substrates; Surface acoustic wave devices; Surface impedance;
Conference_Titel :
Frequency Control Symposium, 1998. Proceedings of the 1998 IEEE International
Conference_Location :
Pasadena, CA
Print_ISBN :
0-7803-4373-5
DOI :
10.1109/FREQ.1998.718003
