DocumentCode
3452024
Title
Actinic mask inspection using EUV microscope
Author
Harnamoto, K. ; Tanaka, Yuzuru ; Kawashima, Hirotake ; Lee, Seung Yoon ; Hosokawa, Nobuyuki ; Sakaya, Noriyuki ; Hosoya, Morio ; Shoki, Tsutomu ; Watanabe, Takeo ; Kinoshita, Hiroo
fYear
2004
fDate
Oct. 27-29, 2004
Firstpage
20
Lastpage
21
Keywords
Inspection; Laboratories; Lithography; Mirrors; Nonhomogeneous media; Optical films; Optical interferometry; Optical microscopy; Transistors; Ultraviolet sources;
fLanguage
English
Publisher
ieee
Conference_Titel
Microprocesses and Nanotechnology Conference, 2004. Digest of Papers. 2004 International
Print_ISBN
4-99024720-5
Type
conf
DOI
10.1109/IMNC.2004.245701
Filename
1459451
Link To Document