Title :
Modeling of a polyimide diaphragm for an optical pulse pressure sensor
Author :
Hasikin, K. ; Soin, N. ; Ibrahim, F.
Author_Institution :
Dept. of Biomed. Eng., Univ. of Malaya, Kuala Lumpur, Malaysia
Abstract :
This paper presents the modeling of a polyimide diaphragm for an optical pulse pressure sensor. Polyimide is a type of polymer materials that possessed low linear coefficient of thermal expansion and has good thermal stability. The polyimide diaphragm has been designed and its performance is analyzed in terms of diaphragm deflection, diaphragm pressure sensitivity and diaphragm resonance frequency. Two design parameters namely diaphragm radius and diaphragm thickness are varied to study the diaphragm performance. It can be concluded that the modeled micro-diaphragm with a diaphragm radius of 90 ¿m and diaphragm thickness of 4 ¿m respectively has satisfied the maximum allowable deflection and operated in optimum frequency response.
Keywords :
diaphragms; microsensors; optical sensors; polymers; pressure sensors; thermal expansion; thermal stability; micro-diaphragm; optical pulse pressure sensor; optimum frequency response; polyimide diaphragm; polymer materials; pressure sensitivity; resonance frequency; thermal expansion linear coefficient; thermal stability; Optical materials; Optical pulses; Optical sensors; Performance analysis; Polyimides; Polymers; Resonance; Resonant frequency; Thermal expansion; Thermal stability;
Conference_Titel :
Technical Postgraduates (TECHPOS), 2009 International Conference for
Conference_Location :
Kuala Lumpur
Print_ISBN :
978-1-4244-5223-1
Electronic_ISBN :
978-1-4244-5224-8
DOI :
10.1109/TECHPOS.2009.5412059
