Title :
Fabrication of vanadium oxide microbolometers on thin polyimide films
Author :
De Bruyker, D. ; Xu, Benwei
Author_Institution :
Palo Alto Res. Center (PARC), Palo Alto, CA, USA
Abstract :
We report the fabrication and characterization of thin film vanadium oxide microbolometer detector elements on thin (12.5 um) polyimide films. The microbolometer detectors have been designed and are being evaluated for use in scanning radiometers aboard a satellite. Preliminary characterization results (nominal resistance, temperature coefficient, thermistor noise) are reported.
Keywords :
bolometers; microfabrication; microsensors; polymer films; thin film sensors; vanadium compounds; VO; satellite; scanning radiometer; thin film microbolometer detector fabrication; thin polyimide film; Detectors; Fabrication; Films; Noise; Polyimides; Temperature measurement; Thermistors; Thermal sensors; microbolometers; polyimide; thin film technology;
Conference_Titel :
Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII), 2013 Transducers & Eurosensors XXVII: The 17th International Conference on
Conference_Location :
Barcelona
DOI :
10.1109/Transducers.2013.6626701
