DocumentCode
3452329
Title
Fabrication of vanadium oxide microbolometers on thin polyimide films
Author
De Bruyker, D. ; Xu, Benwei
Author_Institution
Palo Alto Res. Center (PARC), Palo Alto, CA, USA
fYear
2013
fDate
16-20 June 2013
Firstpage
62
Lastpage
65
Abstract
We report the fabrication and characterization of thin film vanadium oxide microbolometer detector elements on thin (12.5 um) polyimide films. The microbolometer detectors have been designed and are being evaluated for use in scanning radiometers aboard a satellite. Preliminary characterization results (nominal resistance, temperature coefficient, thermistor noise) are reported.
Keywords
bolometers; microfabrication; microsensors; polymer films; thin film sensors; vanadium compounds; VO; satellite; scanning radiometer; thin film microbolometer detector fabrication; thin polyimide film; Detectors; Fabrication; Films; Noise; Polyimides; Temperature measurement; Thermistors; Thermal sensors; microbolometers; polyimide; thin film technology;
fLanguage
English
Publisher
ieee
Conference_Titel
Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII), 2013 Transducers & Eurosensors XXVII: The 17th International Conference on
Conference_Location
Barcelona
Type
conf
DOI
10.1109/Transducers.2013.6626701
Filename
6626701
Link To Document