Title :
MEMS Lorentz force magnetic sensor based on a balanced torsional resonator
Author :
Mo Li ; Rouf, Vashwar T. ; Jaramillo, G. ; Horsley, David A.
Author_Institution :
Univ. of California, Davis, Davis, CA, USA
Abstract :
We demonstrate an x-axis Lorentz force sensor (LFS) for electronic compass applications. The sensor is based on a 30 μm thick torsional resonator fabricated in a process similar to that used in commercial MEMS gyroscopes. The sensor achieved a resolution of 210 nT/√Hz with a DC supply voltage of 2 V and driving power consumption of 1 mW. Bias instability was measured as 60 nT using the minimum Allan deviation. This mechanically-balanced torsional resonator also confers the advantage of low acceleration sensitivity; the measured response to acceleration is below the sensor´s noise level.
Keywords :
acceleration measurement; compasses; force sensors; gyroscopes; magnetic sensors; microfabrication; micromechanical resonators; statistical analysis; Allan deviation; Lorentz force sensor; MEMS gyroscope; MEMS magnetic sensor; acceleration measurement; bias instability; electronic compass application; magnetic flux density 60 nT; mechanical balanced torsional resonator; microfabrication; power 1 mW; size 30 mum; voltage 2 V; Acceleration; Current measurement; Lorentz covariance; Magnetic field measurement; Magnetic fields; Magnetometers; Sensitivity; Allan deviation; Lorentz force actuator; Magnetometers; acceleration sensitivity; compass;
Conference_Titel :
Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII), 2013 Transducers & Eurosensors XXVII: The 17th International Conference on
Conference_Location :
Barcelona
DOI :
10.1109/Transducers.2013.6626702
