Experimental characterization of a novel single chip flow sensor with automatic compensation of pressure effects

Author

Piotto, M. ; Longhitano, A.N. ; del Cesta, F. ; Bruschi, P.

Author_Institution

IEIIT - Pisa, Pisa, Italy

fYear

2013

fDate

16-20 June 2013

Firstpage

74

Lastpage

77

Abstract

A smart flow sensor fabricated on a single chip with a commercial CMOS process followed by a post-processing technique is characterized. The sensing structures are micro-calorimeters made up of two heaters placed between an upstream and a downstream temperature probe. The integrated read-out electronics performs the automatic compensation of intrinsic offset and pressure effects. The effectiveness of the proposed correction methods is verified in nitrogen at room temperature.

Keywords

CMOS image sensors; calorimeters; compensation; flow sensors; microsensors; pressure; readout electronics; CMOS process; downstream temperature probe; integrated read out electronics; microcalorimeter; post processing technique; pressure effect automatic compensation; single chip flow sensor; temperature 293 K to 298 K; Heating; Pressure measurement; Sensitivity; Silicon; Thermal sensors; Voltage measurement; Smart sensor; chopper amplifier; offset; pressure; thermal flow sensor;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII), 2013 Transducers & Eurosensors XXVII: The 17th International Conference on

Conference_Location

Barcelona

Type

conf

DOI

10.1109/Transducers.2013.6626704

Filename

6626704