Title :
Temperature-Compensated Structure For Saw Pressure Sensor In Very High Temperature
Author :
Hoang Trang ; Marie-Helene, V. ; Jean-Sebastien, D. ; Philippe, Ratajczak ; Philippe, B. ; Pierre, L.-A.
Author_Institution :
CEA/LETI, Grenoble
fDate :
May 29 2007-June 1 2007
Abstract :
This paper concerns the design and the analysis of a surface acoustic wave (SAW) pressure sensor that is capable to work in high temperature (up to 800degC) environment. Novel structures of the device are also presented for self-temperature compensation. Special attention is made on the different possible multilayer structures that could be used, the behavior of the sensor, the electromechanical coupling factor, the wave velocity as well as the required RF matching circuit. These parameters are critical issues for this special SAW sensor.
Keywords :
compensation; high-temperature techniques; pressure sensors; surface acoustic wave sensors; RF matching circuit; SAW pressure sensor; electromechanical coupling factor; high temperature environment; multilayer structures; self-temperature compensation; surface acoustic wave; wave velocity; Acoustic sensors; Acoustic waves; Electromechanical sensors; Fingers; Frequency; Nonhomogeneous media; Silicon; Surface acoustic wave devices; Surface acoustic waves; Temperature sensors;
Conference_Titel :
Frequency Control Symposium, 2007 Joint with the 21st European Frequency and Time Forum. IEEE International
Conference_Location :
Geneva
Print_ISBN :
978-1-4244-0646-3
Electronic_ISBN :
1075-6787
DOI :
10.1109/FREQ.2007.4319026
