VISCO-MEMS: The MEMS-based viscosity sensor using dual spiral vibrating beams

We report a development of MEMS based viscosity sensor "η-MEMS" suitable for in-process measurement for industrial uses. The sensor is based on the principle of the vibrating viscometer. The vibrating body of the viscosity sensor is unique dual spiral structure. The geometry provides a seamless surface and a simple structure of the pseudo-parallel wall in order to create the Couette flow for sensing the viscous stress. In the present study, we propose an improved chip holder having an electromagnet coil and verified the capability of viscosity measurement by using the new holder in preliminary measurement of the viscosity standard liquids.