DocumentCode

3452483

Title

Channel formation and 3-dimensional patterning by imprinting

Author

Pang, S.W.

fYear

2004

fDate

Oct. 27-29, 2004

Firstpage

56

Lastpage

57

Keywords

Etching; Fabrication; Gratings; Plasma applications; Polymer films; Resists; Semiconductor films; Substrates; Surface treatment; Telephony;

fLanguage

English

Publisher

ieee

Conference_Titel

Microprocesses and Nanotechnology Conference, 2004. Digest of Papers. 2004 International

Print_ISBN

4-99024720-5

Type

conf

DOI

10.1109/IMNC.2004.245720

Filename

1459470