DocumentCode :
3452483
Title :
Channel formation and 3-dimensional patterning by imprinting
Author :
Pang, S.W.
fYear :
2004
fDate :
Oct. 27-29, 2004
Firstpage :
56
Lastpage :
57
Keywords :
Etching; Fabrication; Gratings; Plasma applications; Polymer films; Resists; Semiconductor films; Substrates; Surface treatment; Telephony;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Microprocesses and Nanotechnology Conference, 2004. Digest of Papers. 2004 International
Print_ISBN :
4-99024720-5
Type :
conf
DOI :
10.1109/IMNC.2004.245720
Filename :
1459470
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=3452483
