Title :
A 150 V, 320 MHz, low noise self-aligned double diffused lateral (SADDL) pnp transistor
Author :
Sugawara, Y. ; Inaba, M. ; Arakawa, H.
Author_Institution :
Res. Lab., Hitachi Ltd., Ibaraki, Japan
fDate :
31 May-3 Jun 1994
Abstract :
For realization of complementary transistors needed in high voltage, high speed analog ICs, high voltage, high performances lateral pnp transistors have been developed by utilizing the SADDL transistor structure. The developed lateral pnp transistor has a high hFE of l00, high fT of 320 MHz and low noise figure of 3 dB in spite of a high BVCEO of 150 V. When BVCEO of the developed SADDL transistor is 340 V, hFE is 50 and fT is 120 MHz. These fT´s are about 5 times those of the best conventional lateral pnp transistors with the same BVCEO, as reported to date
Keywords :
semiconductor device noise; 120 to 320 MHz; 150 to 340 V; 3 dB; SADDL transistor structure; complementary transistors; double diffused lateral transistor; high speed analog ICs; high voltage operation; low noise device; pnp transistor; self-aligned process; CMOSFETs; Dielectric devices; Electric variables; Fabrication; Hafnium; Isolation technology; Niobium compounds; Noise figure; Transistors; Voltage;
Conference_Titel :
Power Semiconductor Devices and ICs, 1994. ISPSD '94., Proceedings of the 6th International Symposium on
Conference_Location :
Davos
Print_ISBN :
0-7803-1494-8
DOI :
10.1109/ISPSD.1994.583815