3452498

Growth manner and mechanical characteristics of amorphous carbon nanopillar grown by EB-CVD

Okada, Satoshi ; Mukawa, Takabito ; Kobayashi, Ryota ; Fujita, Junichi ; Ishida, Masahiko ; Iehihashi, T. ; Ochiai, Yukinori ; Kaito, Takashi ; Matsui, Shinji

2004

Oct. 27-29, 2004

58

59

Amorphous materials; Chemical technology; Chemical vapor deposition; Electron beams; Nanotechnology; National electric code; Physics; Pressure control; Resonance; Scanning electron microscopy;

English

ieee

Microprocesses and Nanotechnology Conference, 2004. Digest of Papers. 2004 International

4-99024720-5

conf

10.1109/IMNC.2004.245721

1459471