Dynamic response of tactile sensor applying cantilever in elastomer

Author

Hosono, Minako ; Noda, Kentaro ; Matsumoto, Kaname ; Shimoyama, Isao

Author_Institution

Ind. Res. Inst. of Shizuoka Prefecture, Shizuoka, Japan

fYear

2013

fDate

16-20 June 2013

Firstpage

102

Lastpage

105

Abstract

We report on the dynamic characteristics of a tactile sensor using a micro standing cantilever embedded in a silicone elastomer. Vibration test results show that the dynamic characteristics of the sensor, which is composed of a cantilever and a surrounding elastomer, depend on those of the elastomer part. Moreover, no matter how much the resonant frequency of the cantilever is, it can follow the oscillating deformation of the elastomer as long as the oscillation frequency is below the resonant frequency of the combined sensor structure.

Keywords

cantilevers; deformation; dynamic response; dynamic testing; microsensors; oscillations; tactile sensors; Si; deformation oscillation; dynamic response; dynamic tactile sensor characteristics; micro standing cantilever; oscillation frequency; resonant frequency; silicone elastomer; vibration test; Oscillators; Resonant frequency; Springs; Strain; Tactile sensors; Vibrations; Dynamic characteristics; Piezoresistive cantilever; Polydimethylsiloxane; Resonant frequency; Spring stiffness;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII), 2013 Transducers & Eurosensors XXVII: The 17th International Conference on

Conference_Location

Barcelona

Type

conf

DOI

10.1109/Transducers.2013.6626711

Filename

6626711