Title :
Dynamic response of tactile sensor applying cantilever in elastomer
Author :
Hosono, Minako ; Noda, Kentaro ; Matsumoto, Kaname ; Shimoyama, Isao
Author_Institution :
Ind. Res. Inst. of Shizuoka Prefecture, Shizuoka, Japan
Abstract :
We report on the dynamic characteristics of a tactile sensor using a micro standing cantilever embedded in a silicone elastomer. Vibration test results show that the dynamic characteristics of the sensor, which is composed of a cantilever and a surrounding elastomer, depend on those of the elastomer part. Moreover, no matter how much the resonant frequency of the cantilever is, it can follow the oscillating deformation of the elastomer as long as the oscillation frequency is below the resonant frequency of the combined sensor structure.
Keywords :
cantilevers; deformation; dynamic response; dynamic testing; microsensors; oscillations; tactile sensors; Si; deformation oscillation; dynamic response; dynamic tactile sensor characteristics; micro standing cantilever; oscillation frequency; resonant frequency; silicone elastomer; vibration test; Oscillators; Resonant frequency; Springs; Strain; Tactile sensors; Vibrations; Dynamic characteristics; Piezoresistive cantilever; Polydimethylsiloxane; Resonant frequency; Spring stiffness;
Conference_Titel :
Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII), 2013 Transducers & Eurosensors XXVII: The 17th International Conference on
Conference_Location :
Barcelona
DOI :
10.1109/Transducers.2013.6626711
