Title :
Characterization of magnetic nanostructures fabricated by electron beam induced-chemical vapor deposition with iron carbonyl gas
Author :
Takeguchi, M. ; Shimojo, Makoto ; Mitsuishi, K. ; Tanaka, Mitsuru ; Furuya, K.
Keywords :
Chemical vapor deposition; Electron beams; Fabrication; Iron; Magnetic materials; Materials science and technology; Nanoscale devices; Nanostructured materials; Nanostructures; Transmission electron microscopy;
Conference_Titel :
Microprocesses and Nanotechnology Conference, 2004. Digest of Papers. 2004 International
Print_ISBN :
4-99024720-5
DOI :
10.1109/IMNC.2004.245723