DocumentCode :
3452588
Title :
Fabrication of low line edge roughness mold by SOG replica method
Author :
Kurashima, Y. ; Hiroshima, H. ; Komuro, M. ; Yamazaki, N. ; Taniguchi, J. ; Miyamoto, I.
fYear :
2004
fDate :
Oct. 27-29, 2004
Firstpage :
66
Lastpage :
67
Keywords :
Atomic force microscopy; Atomic measurements; Etching; Fabrication; Force measurement; Rough surfaces; Scanning electron microscopy; Semiconductor films; Standards development; Surface roughness;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Microprocesses and Nanotechnology Conference, 2004. Digest of Papers. 2004 International
Print_ISBN :
4-99024720-5
Type :
conf
DOI :
10.1109/IMNC.2004.245725
Filename :
1459475
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=3452588
