DocumentCode :
3452623
Title :
Reproducibility of photo-nanoimprint
Author :
Hiroshima, H. ; Kurashima, Y. ; Komuro, M.
fYear :
2004
fDate :
Oct. 27-29, 2004
Firstpage :
70
Lastpage :
71
Keywords :
Atomic force microscopy; Calibration; Degradation; Distortion measurement; Image edge detection; Image resolution; Nanolithography; Nonlinear distortion; Polymers; Reproducibility of results;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Microprocesses and Nanotechnology Conference, 2004. Digest of Papers. 2004 International
Print_ISBN :
4-99024720-5
Type :
conf
DOI :
10.1109/IMNC.2004.245727
Filename :
1459477
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=3452623
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