Title :
Fabrication methods for integrated biosensors
Author :
Gregory, C.M. ; Hatfield, J V
Author_Institution :
Dept. of Electr. Eng. & Electron., Univ. of Manchester Inst. of Sci. & Technol., UK
Abstract :
The use of sensors in medical and environmental applications is increasing rapidly. Biosensors make up a proportion of this market. By modifying fabrication techniques from the well established electronics industry the manufacture of cheap and reliable biosensors could be realised alongside the development of integrated biosensors. By incorporating the necessary electronics on the same substrate as the sensor, noise and cost could be reduced. All steps for the fabrication of the sensor part of an integrated glucose sensor have been developed, along with a useful technique for the deposition of polymer membranes. The set polymer must not be soluble in acetone for this technique to work
Keywords :
biomembranes; biosensors; electrochemical analysis; electrochemical electrodes; etching; photoresists; chemically sensitive membranes; diffusion limited enzyme electrodes; etched; fabrication methods; integrated biosensors; integrated glucose sensor; photoresist; polymer membrane deposition; reduced cost; reduced noise; reliable biosensors; tri-layer lift-off technique;
Conference_Titel :
Advances in Sensors, IEE Colloquium on
Conference_Location :
London
DOI :
10.1049/ic:19951514