• DocumentCode
    3452657
  • Title

    A foundry MOSFET electrometer for single-electron detection

  • Author

    Clement, Nicolas ; Inokawa, Hiroshi

  • fYear
    2004
  • fDate
    Oct. 27-29, 2004
  • Firstpage
    74
  • Lastpage
    75
  • Keywords
    Capacitance; Character generation; Electrons; Foundries; Laboratories; Lithography; MOSFET circuits; Manufacturing; Temperature sensors; Voltage;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Microprocesses and Nanotechnology Conference, 2004. Digest of Papers. 2004 International
  • Print_ISBN
    4-99024720-5
  • Type

    conf

  • DOI
    10.1109/IMNC.2004.245729
  • Filename
    1459479
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3452657