Title :
A foundry MOSFET electrometer for single-electron detection
Author :
Clement, Nicolas ; Inokawa, Hiroshi
Keywords :
Capacitance; Character generation; Electrons; Foundries; Laboratories; Lithography; MOSFET circuits; Manufacturing; Temperature sensors; Voltage;
Conference_Titel :
Microprocesses and Nanotechnology Conference, 2004. Digest of Papers. 2004 International
Print_ISBN :
4-99024720-5
DOI :
10.1109/IMNC.2004.245729
