DocumentCode :
3452691
Title :
Evaluation of metal-insulatur-metal free-space-wiring fabricated by FIB-CVD
Author :
Nakamatsu, Ken-ichiro ; Kometani, Reo ; Morita, Takahko ; Kaito, Takashi ; Fujita, Jun-ichi ; Ochiai, Yuya ; Ichihashi, T. ; Tajima, Tsutomu ; Matsui, Shinji
fYear :
2004
fDate :
Oct. 27-29, 2004
Firstpage :
76
Lastpage :
77
Keywords :
Chemical vapor deposition; Fabrication; Ion beams; Metal-insulator structures; Nanoscale devices; National electric code; Tungsten; Voltage; Wire; Wiring;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Microprocesses and Nanotechnology Conference, 2004. Digest of Papers. 2004 International
Print_ISBN :
4-99024720-5
Type :
conf
DOI :
10.1109/IMNC.2004.245730
Filename :
1459480
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=3452691
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