Title :
High-Performance GaAs MISFETs with Self-Assembled Nanodielectrics
Author :
Lin, H.C. ; Lu, G. ; Ye, P.D. ; Xuan, Y. ; Facchetti, A. ; Marks, T.J.
Author_Institution :
School of Electrical and Computer Engineering, Purdue University, West Lafayette, IN 47906
Keywords :
Dielectrics and electrical insulation; Fabrication; Gallium arsenide; MISFETs; MOCVD; MOSFETs; Molecular beam epitaxial growth; Self-assembly; Surface treatment; Transconductance;
Conference_Titel :
Device Research Conference, 2006 64th
Conference_Location :
State College, PA, USA
Print_ISBN :
0-7803-9748-7
DOI :
10.1109/DRC.2006.305113
