Title :
Exploring Low Temperature Poly-Si for Low Cost and Low Power Sub-micron Digital Operation
Author :
Li, Jing ; Bansal, Aditya ; Roy, Kaushik
Author_Institution :
School of ECE, Purdue University, West Lafayette, IN 47907, Email: li147@purdue.edu
Keywords :
Costs; Crystallization; Dielectric substrates; Digital circuits; Fabrication; Grain boundaries; Grain size; Silicon; Temperature; Thin film transistors;
Conference_Titel :
Device Research Conference, 2006 64th
Conference_Location :
State College, PA, USA
Print_ISBN :
0-7803-9748-7
DOI :
10.1109/DRC.2006.305118
