Title :
Numerical investigation of defect printability in extreme ultraviolet (EUV) reflector: Ru/Mo/Si mulitlayer system
Author :
Kaug, I. ; Ahn, Jinho ; Oh, Hye-Keun ; Chung, Yong-Chae
Keywords :
Ceramics; Materials science and technology; Optical distortion; Optical scattering; Optical surface waves; Phase distortion; Physics; Reflectivity; Solid modeling; Ultraviolet sources;
Conference_Titel :
Microprocesses and Nanotechnology Conference, 2004. Digest of Papers. 2004 International
Print_ISBN :
4-99024720-5
DOI :
10.1109/IMNC.2004.245742
