Efficient transfer of carbon nanotubes using an LOR resist sacrificial layer

In this paper, a novel and efficient approach for transferring carbon nanotubes (CNTs) from quartz growth substrates to target substrates is presented. The novelty is the use of a thick LOR (lift-off resist, MicroChem) sacrificial layer as a transfer medium. This layer provides additional mechanical robustness for easier handling and can be dissolved with mild chemistry resulting in only low amounts of residues on the CNTs. The process involves few and simple steps making it a robust and efficient alternative to other transfer methods. Transferring aligned carbon nanotubes, the directionality is preserved. Because of these advantages the process is a useful technique for CNT device fabrication.