Title :
A simulation of spectroscopic backscattered electron signals from subsurface cu interconnect structures
Author :
Suzuki, Yusuke ; Yasuda, Masaaki ; Kawata, Hiroaki ; Hirai, Yoshihiko
Keywords :
Dielectric materials; Electron beams; Energy loss; Inspection; Ionization; Physics; Scattering; Signal generators; Spectroscopy;
Conference_Titel :
Microprocesses and Nanotechnology Conference, 2004. Digest of Papers. 2004 International
Print_ISBN :
4-99024720-5
DOI :
10.1109/IMNC.2004.245744
