A simulation of spectroscopic backscattered electron signals from subsurface cu interconnect structures

Author

Suzuki, Yusuke ; Yasuda, Masaaki ; Kawata, Hiroaki ; Hirai, Yoshihiko

fYear

2004

fDate

Oct. 27-29, 2004

Firstpage

102

Lastpage

103

Keywords

Dielectric materials; Electron beams; Energy loss; Inspection; Ionization; Physics; Scattering; Signal generators; Spectroscopy;

fLanguage

English

Publisher

ieee

Conference_Titel

Microprocesses and Nanotechnology Conference, 2004. Digest of Papers. 2004 International

Print_ISBN

4-99024720-5

Type

DOI

10.1109/IMNC.2004.245744

Filename

1459494

Link To Document