Title :
Nano-diamond vacuum MEMS for RF applications
Author :
Heidrich, N. ; Hees, J. ; Zuerbig, V. ; Iankov, D. ; Pletschen, W. ; Sah, R.E. ; Raynor, B. ; Kirste, L. ; Nebel, C.E. ; Ambacher, Oliver ; Lebedev, Vladimir
Author_Institution :
Fraunhofer Inst. for Appl. Solid State Phys. (IAF), Freiburg, Germany
Abstract :
This work considers the challenges and technical solutions concerning the deposition of thin films and processing of emerging vacuum microelectromechanical systems (MEMS) based on nanodiamond flexural beams. It is demonstrated that the add-on processing of MEMS chips allows for fabrication of functional nano-features such as nanoscale anode-cathode spacing in order to realize low-bias field emission. Emission current densities up to 500 nA per nanodiamond tip were achieved at an applied bias of 30 V.
Keywords :
current density; diamond; field emission; micromechanical devices; nanostructured materials; vacuum apparatus; C; RF applications; add-on processing; emission current densities; low-bias field emission; nanodiamond flexural beams; nanodiamond vacuum MEMS; nanoscale anode-cathode spacing; thin films; vacuum microelectromechanical systems; voltage 30 V; Diamonds; Electrodes; Films; III-V semiconductor materials; Micromechanical devices; Nanoscale devices; Radio frequency; MEMS; Nano-diamond; field emission;
Conference_Titel :
Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII), 2013 Transducers & Eurosensors XXVII: The 17th International Conference on
Conference_Location :
Barcelona
DOI :
10.1109/Transducers.2013.6626741
