Title :
Active interference filters using silicon-compatible materials
Author :
Poenar, D.P. ; French, P.J. ; Wolffenbuttel, R.F.
Author_Institution :
Dept. of Electr. Eng., Delft Univ. of Technol., Netherlands
Abstract :
The basic aim of this work is to obtain optical detectors with a spectral response programmable by design using the combined response of polysilicon and monocrystalline silicon photodiodes. Such an approach is needed in order to obtain a colour sensor with improved flexibility and control of its characteristic parameters
Keywords :
colorimetry; elemental semiconductors; interference filters; optical filters; photodiodes; silicon; Si; active interference filters; characteristic parameters; colour sensor; optical detectors; photodiodes; polysilicon; spectral response; Active filters; Diodes; Intelligent sensors; Interference; Optical films; Photodiodes; Reflectivity; Silicon; Substrates; Wavelength measurement;
Conference_Titel :
Semiconductor Conference, 1995. CAS'95 Proceedings., 1995 International
Conference_Location :
Sinaia
Print_ISBN :
0-7803-2647-4
DOI :
10.1109/SMICND.1995.495055
