Design and evaluation of microheater combined QCM array for thermal desorption spectroscopy

Author

Sakai, J. ; Iida, N. ; Sohgawa, Masayuki ; Abe, Takashi

Author_Institution

Niigata Univ., Niigata, Japan

fYear

2013

fDate

16-20 June 2013

Firstpage

234

Lastpage

237

Abstract

In this paper, we propose a single microheater combined quartz crystal microbalance array for thermal desorption spectroscopy. The each QCM has two electrodes for exciting thickness shear mode (TSM) vibrations on one side of the crystal and a double-spiral-shape heater on the other side. The resonance frequency is stable when a voltage was applied on the microheater. Carbon microparticles for gas adsorption were coated on one of the QCMs and the frequency change during temperature increase was extracted by subtracting the change of the other QCM. The proposed QCM array can monitor small mass changes at sub-ng level as a function of temperature.

Keywords

desorption; electrodes; infrared spectroscopy; quartz crystal microbalances; QCM array; carbon microparticles; double-spiral-shape heater; electrodes; microheater; quartz crystal microbalance array; thermal desorption spectroscopy; thickness shear mode; Arrays; Crystals; Electrodes; Heating; Monitoring; Temperature measurement; Temperature sensors; Microheater; QCM array; Thermal desorption spectroscopy;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII), 2013 Transducers & Eurosensors XXVII: The 17th International Conference on

Conference_Location

Barcelona

Type

conf

DOI

10.1109/Transducers.2013.6626745

Filename

6626745