مرکز منطقه ای اطلاع رساني علوم و فناوري - Experimental evaluation of arrayed microcolumn with a monolithic structure

DocumentCode :

3453164

Title :

Experimental evaluation of arrayed microcolumn with a monolithic structure

Author :

Jeong, J.W. ; Kim, D.J. ; Kim, H.S. ; Choi, S.K. ; Kim, D.Y.

fYear :

2004

fDate :

Oct. 27-29, 2004

Firstpage :

110

Lastpage :

111

Keywords :

Assembly; Electron beams; Electron emission; Lenses; Lithography; Microoptics; Moon; Optical microscopy; Silicon; Voltage;

fLanguage :

English

Publisher :

ieee

Conference_Titel :

Microprocesses and Nanotechnology Conference, 2004. Digest of Papers. 2004 International

Print_ISBN :

4-99024720-5

Type :

conf

DOI :

10.1109/IMNC.2004.245748

Filename :

1459498

Link To Document :