Nanoimprint and lift-off process using poly vinyl alcohol

Author

Nakamatsu, Ken-ichiro ; Tone, Katsuhiko ; Ohtake, Toshihito ; Tabata, Hitoshi ; Matsui, Shinji

fYear

2004

fDate

Oct. 27-29, 2004

Firstpage

120

Lastpage

121

Keywords

Costs; Etching; Gold; Nanoscale devices; Nanostructured materials; Polymers; Resins; Resists; Solvents; Throughput;

fLanguage

English

Publisher

ieee

Conference_Titel

Microprocesses and Nanotechnology Conference, 2004. Digest of Papers. 2004 International

Print_ISBN

4-99024720-5

Type

DOI

10.1109/IMNC.2004.245753

Filename

1459503

Link To Document