Title :
Nanoirnprint of glass materials with glassy carbon mold fabricated by focused-lon-beam etching
Author :
Takahashi, Masaham ; Sugimoto, Kohichi ; Maeda, Ryutaro
Keywords :
Dry etching; Embossing; Glass; Heating; Machining; Micromechanical devices; Nanostructured materials; Organic materials; Temperature; Wet etching;
Conference_Titel :
Microprocesses and Nanotechnology Conference, 2004. Digest of Papers. 2004 International
Print_ISBN :
4-99024720-5
DOI :
10.1109/IMNC.2004.245754
