Title :
Determination of resonance frequency and sensitivity of resonant microsensors with electrostatic excitation and capacitive detection
Author :
Moldovan, Carmen ; Babarada, Florin ; Stefanescu, Bogdan ; Moldovan, Romulus
Author_Institution :
Inst. of Microtechnol., Bucharest, Romania
Abstract :
This work presents the results obtained through simulation of a microresonant sensor resonance frequency and sensitivity, using the conservation energy and Rayleigh´s approximation method. The results are used for the project and design of the resonant microbridge and excitation-detection circuits
Keywords :
approximation theory; capacitance; electrostatic devices; microsensors; resonance; sensitivity; Rayleigh approximation method; capacitive detection; conservation energy; electrostatic excitation; resonance frequency; resonant microbridge; resonant microsensors; sensitivity; simulation; Bridges; Building materials; Electrostatics; Kinetic theory; Microsensors; Potential energy; Resonance; Resonant frequency;
Conference_Titel :
Semiconductor Conference, 1995. CAS'95 Proceedings., 1995 International
Conference_Location :
Sinaia
Print_ISBN :
0-7803-2647-4
DOI :
10.1109/SMICND.1995.495066
