Title :
Electrical Performance of Ta-Based Ohmic Contacts on Undoped AlGaN/AlN/GaN Heterostructures
Author :
Sun, Yunju ; Eastman, L.F.
Author_Institution :
426 Phillips Hall, Cornell University, Ithaca NY 14853. E-mail: ys99@cornell.edu Phone: 607-255-1431/607-342-0651 Fax: 607-255-4742
Keywords :
Aluminum gallium nitride; Annealing; Contact resistance; Gallium nitride; Gold; HEMTs; MODFETs; Ohmic contacts; Surface resistance; Thermal resistance;
Conference_Titel :
Device Research Conference, 2006 64th
Conference_Location :
State College, PA, USA
Print_ISBN :
0-7803-9748-7
DOI :
10.1109/DRC.2006.305141
