Title :
Trial fabrication of micron sized arm using reversible TiNi alloy thin film actuators
Author :
Kuribayashi, Katsutoshi ; Shimizu, Seiji ; Nishinohara, Takayuki ; Taniguchi, Takao ; Yoshitake, Masahiro ; Ogawa, Sooichi
Author_Institution :
Fac. of Eng., Yamaguchi Univ., Japan
Abstract :
A micron-sized arm which has large work space and uses reversible TiNi thin film is proposed. The transformation characteristics as analyzed by the DSC method shows that RTiNi can be controlled around 60°C. The design method and fabrication process for the arm are described, and the arm was fabricated on silicon wafer. It was shown that micron sized arm using three RTiNi thin films could be fabricated based on the trial fabrication of simple micron sized arm using a RTiNi thin film
Keywords :
manipulators; Si; TiNi alloy thin film actuators; fabrication process; microactuators; micron-sized arm; silicon wafer; Actuators; Compressive stress; Fabrication; Nickel alloys; Robots; Shape memory alloys; Silicon; Temperature; Tensile stress; Transistors;
Conference_Titel :
Intelligent Robots and Systems '93, IROS '93. Proceedings of the 1993 IEEE/RSJ International Conference on
Conference_Location :
Yokohama
Print_ISBN :
0-7803-0823-9
DOI :
10.1109/IROS.1993.583865
