• DocumentCode
    3453405
  • Title

    Nanoimprint lithography for high aspect ratio patterns

  • Author

    Konishi, Takaaki ; Kanakugi, Tomohiro ; Toyota, Hiroshi ; Kawata, Hirotaka ; Hirai, Yoshihiko

  • fYear
    2004
  • fDate
    Oct. 27-29, 2004
  • Firstpage
    126
  • Lastpage
    127
  • Keywords
    High speed optical techniques; Lenses; Nanolithography; Optical device fabrication; Optical polymers; Optical retarders; Optical switches; Resists; Stress; Surface treatment;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Microprocesses and Nanotechnology Conference, 2004. Digest of Papers. 2004 International
  • Print_ISBN
    4-99024720-5
  • Type

    conf

  • DOI
    10.1109/IMNC.2004.245756
  • Filename
    1459506
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3453405