DocumentCode
3453437
Title
Development of ultra-micromanipulator system under stereo SEM observation
Author
Morishita, Hiroshi ; Hatamura, Yotaro
Author_Institution
Dept. of Eng. Synthesis, Tokyo Univ., Japan
Volume
3
fYear
1993
fDate
26-30 Jul 1993
Firstpage
1717
Abstract
The authors discuss the specifications for constructing an ultra-micromanipulator system, and develop such a system under 3-D SEM observation using a joy-stick mechanism, with which an operator can deal with things smaller than 1 μm. It is called a nanorobot system. Some experimental results giving knowledge about the difference between nanometer world and the macroscopic world are reported
Keywords
manipulators; joy-stick mechanism; macroscopic world; nanometer world; nanorobot system; stereo SEM observation; ultra-micromanipulator system; Assembly systems; Fabrication; Intelligent robots; Intelligent systems; Machine intelligence; Manipulators; Mass production; Research and development; Robotic assembly; Semiconductor device manufacture;
fLanguage
English
Publisher
ieee
Conference_Titel
Intelligent Robots and Systems '93, IROS '93. Proceedings of the 1993 IEEE/RSJ International Conference on
Conference_Location
Yokohama
Print_ISBN
0-7803-0823-9
Type
conf
DOI
10.1109/IROS.1993.583868
Filename
583868
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