Title :
Cantilever embedded MOSFET for bio-sensing
Author :
Rabbani, Shahram ; Brishbhan, Panwar
Author_Institution :
Centre for Appl. Res. in Electron., Indian Inst. of Technol. Delhi, New-Delhi, India
Abstract :
Biosensors are used to identify analytes such as DNA molecules, proteins or micro-organisms. These devices couple a biological recognition element (the probe) with a physical transducer to generate an observable signal. The present work describes a cantilever embedded MOSFET structure for bio-sensing. The main features of the structure are piezoelectric actuation/sensing and MOSFET based readout mechanism for parallel array operation to improve the signal to noise ratio. The integration of MEMS structure with CMOS fabrication process provides the realizability of a system on chip with detection in sub-picogram range.
Keywords :
CMOS integrated circuits; DNA; MOSFET; biosensors; cantilevers; piezoelectric actuators; CMOS fabrication process; DNA molecules; MEMS structure; biosensing; biosensors; cantilever embedded MOSFET structure; piezoelectric actuation; piezoelectric sensing; sub-picogram range; Arrays; Biosensors; Encoding; MOSFET circuits; Resonant frequency; Sensitivity; Biosensor; MEMS; cantilever;
Conference_Titel :
Electrical and Computer Engineering (CCECE), 2011 24th Canadian Conference on
Conference_Location :
Niagara Falls, ON
Print_ISBN :
978-1-4244-9788-1
Electronic_ISBN :
0840-7789
DOI :
10.1109/CCECE.2011.6030498
