Cantilever embedded MOSFET for bio-sensing

Author

Rabbani, Shahram ; Brishbhan, Panwar

Author_Institution

Centre for Appl. Res. in Electron., Indian Inst. of Technol. Delhi, New-Delhi, India

fYear

2011

fDate

8-11 May 2011

Abstract

Biosensors are used to identify analytes such as DNA molecules, proteins or micro-organisms. These devices couple a biological recognition element (the probe) with a physical transducer to generate an observable signal. The present work describes a cantilever embedded MOSFET structure for bio-sensing. The main features of the structure are piezoelectric actuation/sensing and MOSFET based readout mechanism for parallel array operation to improve the signal to noise ratio. The integration of MEMS structure with CMOS fabrication process provides the realizability of a system on chip with detection in sub-picogram range.

Keywords

CMOS integrated circuits; DNA; MOSFET; biosensors; cantilevers; piezoelectric actuators; CMOS fabrication process; DNA molecules; MEMS structure; biosensing; biosensors; cantilever embedded MOSFET structure; piezoelectric actuation; piezoelectric sensing; sub-picogram range; Arrays; Biosensors; Encoding; MOSFET circuits; Resonant frequency; Sensitivity; Biosensor; MEMS; cantilever;

fLanguage

English

Publisher

ieee

Conference_Titel

Electrical and Computer Engineering (CCECE), 2011 24th Canadian Conference on

Conference_Location

Niagara Falls, ON

ISSN

0840-7789

Print_ISBN

978-1-4244-9788-1

Electronic_ISBN

0840-7789

Type

conf

DOI

10.1109/CCECE.2011.6030498

Filename

6030498