• DocumentCode
    3453536
  • Title

    Static and noise characterization of deep submicron CMOS devices

  • Author

    Zimmermann, Jacques ; Ghibaudo, Gérard

  • Author_Institution
    Lab. de Phys. des Composants a Semicond., ENSERG, Grenoble, France
  • fYear
    1995
  • fDate
    11-14 Oct 1995
  • Firstpage
    521
  • Lastpage
    529
  • Abstract
    Today, 0.35 μm CMOS technologies have been brought up to integrated circuit mass production. The trend for the next two years is to implement the forthcoming 0.25 μm CMOS and the 0.18 μm CMOS technologies. Thus deep submicron CMOS is a reality from the standpoint of the CMOS IC market as a very well mastered device. Nevertheless, this device still is an object of interest for applied physicists and engineers since new and interesting phenomena show up (e.g. random telegraph signal or RTS), that are believed to be at the source of enhanced excess noises commonly observed in them. Due to the importance played by noise in analogue circuits applications, specific noise studies have been made of these devices. The present paper provides a summary of the actual knowledge on this topic
  • Keywords
    CMOS integrated circuits; carrier mobility; fluctuations; integrated circuit measurement; integrated circuit noise; 0.18 to 0.35 micron; IC mass production; LF noise characterization; RTS measurement; deep submicron CMOS devices; excess noise; integrated circuits; random telegraph signal; static characterization; Electron beams; Electronic switching systems; Fluctuations; Lithography; Low-frequency noise; MOSFETs; Measurement standards; Rain; Threshold voltage; Vents;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Semiconductor Conference, 1995. CAS'95 Proceedings., 1995 International
  • Conference_Location
    Sinaia
  • Print_ISBN
    0-7803-2647-4
  • Type

    conf

  • DOI
    10.1109/SMICND.1995.495074
  • Filename
    495074