A CMOS micromanipulation and capacitive immunosensor array towards single magnetic microbead detection

Author

An-Yu Chang ; Lu, Michael S-C

Author_Institution

Inst. of Electron. Eng., Nat. Tsing Hua Univ., Hsinchu, Taiwan

fYear

2013

fDate

16-20 June 2013

Firstpage

345

Lastpage

348

Abstract

Magnetic microbeads are widely used in biotechnology and biomedical research for manipulation and detection of cells and biomolecules. This work presents an integrated platform to perform microbead-based manipulation and detection by implementing electromagnetic microcoils and capacitive biosensors on a CMOS (complementary metal oxide semiconductor) chip. Our detection method provides the advantages of convenient fabrication and requiring no externally applied magnetic fields for operation. Microbeads coated with streptavidin were successfully driven to the sensor sites and detection of a single microbead was demonstrated with an average capacitance change of -5.3 fF.

Keywords

CMOS integrated circuits; biomagnetism; biosensors; capacitance; capacitive sensors; cellular biophysics; coatings; magnetic particles; molecular biophysics; proteins; CMOS chip; CMOS micromanipulation; average capacitance change; biomedical research; biomolecule detection; biotechnology; capacitive biosensors; capacitive immunosensor array; cell detection; complementary metal oxide semiconductor chip; electromagnetic microcoils; microbead coating; microbead-based detection; microbead-based manipulation; sensor detection; single magnetic microbead detection; streptavidin; Arrays; Biosensors; CMOS integrated circuits; Capacitance; Capacitive sensors; Magnetic resonance; Micromagnetics; CMOS; Capacitive detection; Electromagnetic manipulation; Magnetic microbead;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII), 2013 Transducers & Eurosensors XXVII: The 17th International Conference on

Conference_Location

Barcelona

Type

conf

DOI

10.1109/Transducers.2013.6626773

Filename

6626773