Title :
Graphical I/O data flow controller for SUPREM III
Author :
Bajdechi, Qvidiu
Author_Institution :
Dept. of Electron. & Telecommun., Politehnic Univ. of Bucharest, Romania
Abstract :
This paper presents a powerful and friendly graphical interface for SUPREM III process simulator based on LabWindows 2.2. The process model steps and their parameters are read using special designed panels for each SUPREM III card. Output data (the structure impurity distributions and structure layers) can be displayed with zoom, overplot and optimal auto-scaling. This graphical I/O controller runs on PC-AT machines with at least 640 KB RAM, using MS-DOS
Keywords :
data flow computing; digital simulation; graphical user interfaces; impurity distribution; semiconductor process modelling; LabWindows 2.2; PC-AT machines; SUPREM III; data flow controller; graphical interface; optimal auto-scaling; process simulator; simulation software; structure impurity distributions; structure layers; Automatic control; Buildings; Computational modeling; Data processing; Flow graphs; Graphics; Impurities; Process control; Semiconductor device modeling; Silicon;
Conference_Titel :
Semiconductor Conference, 1995. CAS'95 Proceedings., 1995 International
Conference_Location :
Sinaia
Print_ISBN :
0-7803-2647-4
DOI :
10.1109/SMICND.1995.495089
