• DocumentCode
    3454046
  • Title

    Generalized Characteristics of Resonant Polymer-Coated Microcantilevers in Viscous Liquid Media

  • Author

    Cox, R. ; Wenzel, M.J. ; Josse, F. ; Heinrich, S.M. ; Dufour, I.

  • Author_Institution
    Marquette Univ., Milwaukee
  • fYear
    2007
  • fDate
    May 29 2007-June 1 2007
  • Firstpage
    420
  • Lastpage
    425
  • Abstract
    Expressions describing the resonant frequency and quality factor of a dynamically-driven, polymer-coated microcantilever in a viscous liquid medium have been obtained. These generalized formulas are used to describe the effects the operational medium and the coating has on the device sensitivity when used in liquid-phase chemical sensing applications. The derived expressions are shown to reduce to well-known formulas for the case of an uncoated cantilever in an invisicid medium and the case of a coated cantilever in air. The theoretical results are compared to existing chemical sensor data in aqueous and viscous solutions.
  • Keywords
    cantilevers; chemical sensors; micromechanical devices; chemical sensor data; device sensitivity; invisicid medium; liquid-phase chemical sensing applications; resonant frequency; resonant polymer-coated microcantilevers; viscous liquid media; Chemical sensors; Coatings; Equations; Hydrogen; Laboratories; Polymer films; Q factor; Resonance; Resonant frequency; Stability;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Frequency Control Symposium, 2007 Joint with the 21st European Frequency and Time Forum. IEEE International
  • Conference_Location
    Geneva
  • ISSN
    1075-6787
  • Print_ISBN
    978-1-4244-0646-3
  • Electronic_ISBN
    1075-6787
  • Type

    conf

  • DOI
    10.1109/FREQ.2007.4319109
  • Filename
    4319109