DocumentCode
3454046
Title
Generalized Characteristics of Resonant Polymer-Coated Microcantilevers in Viscous Liquid Media
Author
Cox, R. ; Wenzel, M.J. ; Josse, F. ; Heinrich, S.M. ; Dufour, I.
Author_Institution
Marquette Univ., Milwaukee
fYear
2007
fDate
May 29 2007-June 1 2007
Firstpage
420
Lastpage
425
Abstract
Expressions describing the resonant frequency and quality factor of a dynamically-driven, polymer-coated microcantilever in a viscous liquid medium have been obtained. These generalized formulas are used to describe the effects the operational medium and the coating has on the device sensitivity when used in liquid-phase chemical sensing applications. The derived expressions are shown to reduce to well-known formulas for the case of an uncoated cantilever in an invisicid medium and the case of a coated cantilever in air. The theoretical results are compared to existing chemical sensor data in aqueous and viscous solutions.
Keywords
cantilevers; chemical sensors; micromechanical devices; chemical sensor data; device sensitivity; invisicid medium; liquid-phase chemical sensing applications; resonant frequency; resonant polymer-coated microcantilevers; viscous liquid media; Chemical sensors; Coatings; Equations; Hydrogen; Laboratories; Polymer films; Q factor; Resonance; Resonant frequency; Stability;
fLanguage
English
Publisher
ieee
Conference_Titel
Frequency Control Symposium, 2007 Joint with the 21st European Frequency and Time Forum. IEEE International
Conference_Location
Geneva
ISSN
1075-6787
Print_ISBN
978-1-4244-0646-3
Electronic_ISBN
1075-6787
Type
conf
DOI
10.1109/FREQ.2007.4319109
Filename
4319109
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