DocumentCode
3454315
Title
Quartz Crystal Resonator as a Sensor in Scanning Probe Microscopy
Author
Johann, Jersch ; Fuchs, Harald
Author_Institution
Munster Univ., Munster
fYear
2007
fDate
May 29 2007-June 1 2007
Firstpage
483
Lastpage
487
Abstract
A brief review of the scanning probe microscopy (SPM) on basis of a quartz crystal resonator (QCR) is done. A look on principles of design and development of electronic interface circuits for QCR based SPM is given. A simple and versatile interface for a QCR based SPM developed is presented and some applications are shown.
Keywords
crystal resonators; scanning probe microscopy; sensors; electronic interface circuit; quartz crystal resonator; quartz crystal sensor; scanning probe microscopy sensor; Atomic force microscopy; Circuits; Force control; Force sensors; Magnetic force microscopy; Optical microscopy; Optical resonators; Scanning probe microscopy; Sensor phenomena and characterization; Vibrations; Quartz crystal sensor; Scanning Probe Microscopy; interface electronic;
fLanguage
English
Publisher
ieee
Conference_Titel
Frequency Control Symposium, 2007 Joint with the 21st European Frequency and Time Forum. IEEE International
Conference_Location
Geneva
ISSN
1075-6787
Print_ISBN
978-1-4244-0646-3
Electronic_ISBN
1075-6787
Type
conf
DOI
10.1109/FREQ.2007.4319121
Filename
4319121
Link To Document