Title :
Electrostatic micro transformer using potassium ion electret forming on a comb-drive actuator
Author :
Hayashi, H. ; Suzuki, M. ; Mori, Alessandro ; Sugiyama, Takatoshi ; Hashiguchi, Gen
Author_Institution :
AOI Electron. Co., Ltd., Takamatsu, Japan
Abstract :
This study reports the theory and the testing of an electrostatic transformer. We confirmed that 2 sets of electrostatic actuators with thermal silicon dioxide electret, induced by highly doped potassium ions, can work as the AC voltage step-up transformer. The transformer ratio can be set arbitrarily by the ratio of the electro-mechanical conversion factor and the vibration amplitude of the electrostatic actuators. And the electrostatic transformer works without any influence on the magnetic field and is lightweight. We made the experimental samples to verify our theory. And we try to improve this device to work as parts of a DC-DC converter.
Keywords :
DC-DC power convertors; electrets; electrostatic actuators; micromechanical devices; potassium; silicon compounds; transformers; AC voltage step-up transformer; DC-DC converter; SiO2; comb-drive actuator; electro-mechanical conversion factor; electrostatic microtransformer; highly doped potassium ions; potassium ion electret; thermal silicon dioxide electret; vibration amplitude; Electrets; Electrodes; Electrostatic actuators; Electrostatics; Films; Resonant frequency; DC-DC converter; MEMS; comb-drive; electret; electrostatic actuator; potassium ion; transformer;
Conference_Titel :
Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII), 2013 Transducers & Eurosensors XXVII: The 17th International Conference on
Conference_Location :
Barcelona
DOI :
10.1109/Transducers.2013.6626798