Micro-machining process of fluorocarbon polymer using synchrotron radiation

Fluorocarbon polymer has excellent properties such as high electrical resistivity, low friction coefficient, high thennal stability, chemical inertness, high mechanical strength, and so on. Fluorocarbon polymers such as polytetrafluoroethylene (PTFE) have attracted much attention for applications in various fields. For example, in the fabrication of microelectromechanical (MEMS) system and micro total analytical system ( μ-TAS), the micro-machining of fluorocarbon polymers with nano meter size is required due to chemical inertness and low friction coefficient.